[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

1:36 PM - 1:38 PM JST(4:36 AM - 4:38 AM UTC)

[SO-PS-10-04] Effects of Plasma Hydrogenation on the Performance of T-shaped Gate Poly-Si Thin-Film Transistors

〇Geng-Yuan Xie¹, Cheng-Kuei Lee¹, Pei-Wen Li¹, Ke-Yin Jhou², Kun-Ming Chen², Guo-Wei Huang², Horng-Chih Lin¹ (1. National Yang Ming Chiao Tung University (Taiwan), 2. Taiwon Semiconductor Research Institute (Taiwan))

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