[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

1:38 PM - 1:40 PM JST(4:38 AM - 4:40 AM UTC)

[SO-PS-10-05] Crystal Structure Changes and Their Impact on Electrical Properties through ALD Sub-Cycle Control in the IGO System

〇Gwang Bok Kim¹, Jae Kyeong Jeong¹ (1. Hanyang Univ. (Korea))

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