[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

1:52 PM - 1:54 PM JST(4:52 AM - 4:54 AM UTC)

[SO-PS-10-12] Investigation of HfO₂/ZrO₂ Superlattice Gate Stack for Scaling

〇TZU-I KAO¹, Kai-Wei Huang¹, Yi-Wen Lin¹, Jun-Wei Wu², Yung-Chun Wu^1,2, Fu Ju Hou³ (1. Dept. of Engineering and System Science, National Tsing Hua Univ (Taiwan), 2. College of Semiconductor Research, National Tsing Hua Univ., (Taiwan), 3. Taiwan Semiconductor Research Institute (Taiwan))

Password required to view