[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

1:54 PM - 1:56 PM JST(4:54 AM - 4:56 AM UTC)

[SO-PS-10-13] Extremely Downscaling Ultra-thin ALD-ZnO Transistors to Sub-20nm

〇Minghe Zhang¹, Tingzhen Yi¹, Dengqin Xu¹, Ruibin Duan¹, Junchen Dong², Yi Wang¹, Dedong Han^1,3,4, Xing Zhang^1,5 (1. Peking Univ. (China), 2. Beijing Info. Sci. and Tech. Univ. (China), 3. Beijing Advanced Innovation Center for Integrated Circuits (China), 4. Beijing Superstring Academy of Memory Tech. (China), 5. Peking Univ. Shenzhen Graduate School (China))

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