Presentation Information

[A-1-02]Ultimate Scaling of the Bonding Dielectric for sequential CFET

〇ANNE VANDOOREN1, Kevin Vandersmissen1, Ferenc Fodor1, Gerhard Bast2, Jeffrey Mileham2, Steven Demuynck1, Katia Devriendt1, Naoto Horiguchi1, Serge Biesemans1 (1. imec (Belgium), 2. KLA Corporation (United States of America))