[A-1] CFET Technology

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[A-1-03] Recent insights in direct extraction of access resistance components in NSFET and CFET devices with the cascaded transistor method

〇PIERRE CHARLES EYBEN¹, Andrea Pondini^1,2, Hiroaki Arimura¹, Thomas Chiarella¹, Hans Mertens¹, Clément Porret¹, Erik Rosseel¹, Ritam Sarkar¹, Maryam Hosseini¹, Daisy Zhou¹, Jérome Mitard¹, Naoto Horiguchi¹ (1. IMEC (Belgium), 2. KU Leuven (Belgium))