[A-2] Threshold Voltage Control

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[A-2-01] Vt Fine-Tuning for Multi-Vt using Wet Fine-Etching of LaO in Dipole-first

〇Hikaru Kawarazaki¹, Ju-Geng Lai⁴, Hiroaki Arimura⁴, Leo Lukose⁴, Dai Ueda¹, Stephan Brus⁴, Yukifumi Yoshida², Takayoshi Tanaka², Yoichi Tanaka³, Koji Nakata³, Yuuichi Ogawa³, Nobuko Gan³, Hideaki Iino³, Min-Soo Kim⁴, Naoto Horiguchi⁴, Naveen Reddy⁴, Efrain Altamirano Sanchez⁴ (1. SCREEN SPE Germany GmbH (Germany), 2. SCREEN Semiconductor Solutions Co., Ltd. (Japan), 3. Kurita Water Industries Ltd. (Japan), 4. imec (Belgium))