Presentation Information

[A-2-02]Fluorine-Compatible Dipole-First Gate Stack with Yttrium Oxides for Multi-Vth and Enhanced Device Performance

〇Sangkuk Han1, Kyungsoo Park1, Wonjae Choi1, Wonyoung Jang1, Haesoo Jang1, Kyungwook Park1, Changhwan Choi1 (1. Hanyang University (Korea))