Presentation Information
[A-3-03]Ti-Based Spacer Approach for Semi-Damascene Spacer-is-Dielectric SADP Process Integration at MP18 Demonstration
〇Vincent Renaud1, Gilles Delie1, Debanjan Jana2, Yiting Sun2, Miguel De Abreu Neto3, Sungdae Woo4, David De Roest2, Hyungjoo Shin4, Andrey Sokolov4, Daniele Piumi2, Laurent Souriau1, Chen Wu1, Seongho Park1, Zsolt Tokei1 (1. Imec (Belgium), 2. ASM Belgium (Belgium), 3. ASM Japan (Japan), 4. ASM Korea (Korea))