[A-4] Cryo CMOS and SOI Technology

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[A-4-02] Anomalous Variability of Subthreshold Characteristicsin Bulk and SOI MOSFETs at a Cryogenic Temperature

〇Tomoko Mizutani¹, Kiyoshi Takeuchi¹, Takuya Saraya¹, Takumi Inaba², Hidehiro Asai², Hiroshi Oka², Takahiro Mori², Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1. The University of Tokyo (Japan), 2. AIST (Japan))