[A-4] Cryo CMOS and SOI Technology

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[A-4-03] Planar FD-SOI NFETs with Ultra-Thin Si Body: Device Process Integration

〇Dmitry Batuk¹, Sylvain Baudot¹, Tom Schram ¹, Erik Rosseel¹, Aryan Afzalian¹, Anish Dangol¹, An De Keersgieter¹, Anne Vandooren¹, Farid Sebaai¹, Mohamed Saib¹, Emma Vecchio¹, Subhobroto Choudhury¹, Bianca Chou¹, Naoto Horiguchi¹, Paul Heremans¹ (1. imec (Belgium))