[A-7] 2D Material Integration

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[A-7-03] CMOS-Friendly Doping Strategies for p-Type WSe₂ Field-Effect Transistors

〇Cheng-Chieh Hsieh¹, I-Ling Li¹, Cheng-Yang Hsu¹, Han-Hsiang Pai¹, Tsung-Che Hsieh¹, Hung-Hui Yang¹, Chien-Wei Chen³, Chih-Chao Yang², Ying-Hao Chu¹, Chao-Hui Yeh¹ (1. National Tsing Hua Univ. (Taiwan), 2. Taiwan Semiconductor Research Inst. (Taiwan), 3. Taiwan Instrument Research Inst. (Taiwan))