[B-4] Ferroelectric Memory Devices

12:00 PM - 12:15 PM JST(3:00 AM - 3:15 AM UTC)

[B-4-05] Unraveling the Frequency-Dependent Accelerated Degradation Mechanism in HfO2-Based 3D Trench Ferroelectric Capacitors

〇Fei Yu^1,2, Xingcheng Jin³, Chongyong Guo³, Hongbo Li³, Huan Liu^1,2, Haoji Qian², Bing Chen^1,2, Yan Liu^1,2, Xiao Yu^1,2, Genquan Han^1,2 (1. The School of Microelectronics, Xidian Univ. (China), 2. Hangzhou Inst. of Tech.,Xidian Univ. (China), 3. China Resources Microelectronics Ltd. (China))