[B-7] Ferroelectric Materials

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[B-7-02] Tetragonal-to-Orthorhombic Phase Transition and Dielectric Performance in HZO-Based High-κ Capacitors: The Role of Oxygen Vacancies

〇Dan Lv¹, Yongchang Li¹, Zhenyu Chen², Jian Rong¹, Congcong Xu¹, Lianqi Zhao¹, Lu Wang¹, Mengwei Si², Dongdong Li² (1. Zhangjiang Laboratory (China), 2. Shanghai Jiao Tong University (China))