[B-7] Ferroelectric Materials

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[B-7-03] Dimension-Constrained Ferroelectric Phase Engineering of HfO₂ in 3D Structures for High-Density Nonvolatile Memory

〇Xiangyu Cui¹, Zongwei Shang¹, Xijun Zhou¹, Yifan Chen¹, Changqing Ye³, Xing Wu³, Ming Li^1,2 (1. Peking Univ. (China), 2. Beijing Advanced Innovation Center for Integrated Circuits (China), 3. East China Normal Univ. (China))