Presentation Information

[B-8-02]Enhanced Permittivity in Ga-Doped Hf0.5Zr0.5O2 Ferroelectric Capacitors via Morphotropic Phase Boundary Engineering

〇Zi-Ying Huang1, Yu-Chun Li1, Lei Shen1, David Wei Zhang1,2, Hong-Liang Lu1,2 (1. Fudan Univ. (China), 2. National Integrated Circuit Innovation Center (China))