[B-8] Ferroelectric Memory Materials

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[B-8-04] Ultra-High-κ Hf_0.5Zr_0.5O₂ Capacitors Assisted by Interfacial Layer Engineering

〇Qiang Gao¹, Danyang Chen¹, Lu Wang², Zhiyu Lin¹, Mengwei Si¹, Dongdong Li², Xiuyan Li¹ (1. Shanghai Jiao Tong Univ. (China), 2. Zhangjiang Lab. (China))