Presentation Information

[E-4-01]Experimental Demonstration of Elliptical-shaped CMOS Process-compatible TaOx/HfO2 ReRAM in 3D Structure

〇Park Minsik1, Lee Aryeong1, Park Solji1, Sim Gapseop1,2, Song Jonghyun1,2, Park Namsoo2, Cho Huijae2, Kwon Soohyun2, Kang Minho2, Kim Youngjoo2, Kim Heejong2, Kwon Youna2, Jeon Kanghyeok2, Sul Woosuk2, Kim Choulyoung1, Ko Hyoungho1, Lee Wonchul1,2, Lee jongwon1 (1. Chungnam National Univ. (Korea), 2. National Nanofab Center (Korea))