Presentation Information
[H-6-01]Tailored Doping Technology towards Enhanced p-Type WSe2 FET Application
〇I-Ling Li1, Cheng-Chieh Hsieh1, Cheng-Yang Hsu1, Han-Hsiang Pai1, Tsung-Che Hsieh1, Hung-Hui Yang1, Chan-Yuen Chang2, Chien-Wei Chen2, Chih-Chao Yang3, Ying-Hao Chu1, Chao-Hui Yeh1 (1. National Tsing Hua Univ. (Taiwan), 2. Taiwan Instrument Research Inst. (Taiwan), 3. Taiwan Semiconductor Research Inst. (Taiwan))