[H-6] Low Dimensional Materials II

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[H-6-04 (Late News)] Machine Learning Assisted Process Optimization for High Polarization of Ferroelectric Hf_xZr_1-xO₂ Thin Films

〇Xinrui Ma¹, Danyang Chen¹, Zhiyu Lin¹, Mengwei Si¹, Dongdong Li², Xiuyan Li¹ (1. Shanghai Jiao Tong Univ. (China), 2. Zhangjiang Lab. (China))