[J-1] 3D Integration

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[J-1-01 (Invited)] COW Integration Technology for Capacitor Embedded 3D Functional Interposer

〇Tatsuya Funaki^1,2, Takayuki Ohba¹ (1. Inst. of Sci. Tokyo (Japan), 2. Murata Manufac. Co., Ltd (Japan))