[J-2] Advanced Devices

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[J-2-05] A Study of Electron Beam Focusing and Depth Profiling by DUV-Induced Surface Charging of Floating Metal Electrode Arrays

〇HOTING CHAO¹, SHANGCHEN TSAI¹, WEI CHANG², BURNJENG LIN¹, JIAWREN SHIH¹, CHRONGJUNG LIN², YACHIN KING² (1. Coll. of Semiconductor Research, National Tsing Hua Univ. (Taiwan), 2. Inst. of Electronics Engineering, National Tsing Hua Univ. (Taiwan))