Presentation Information
[J-4-02]Vapor-phase Intercalation of Metal Chlorides into Multilayer Graphene Grown Directly on SiO2/Si via Catalyst-free Microwave Plasma Chemical Vapor Deposition
〇Rika Matsumoto1, Yoshito Watai2, Takashi Matsumoto2 (1. Tokyo Polytechnic Univ. (Japan), 2. Tokyo Electron Technology Solutions Ltd. (Japan))