Presentation Information
[J-5-01]Fluorine Surface Engineering for Vt Control and Memory Window Boost in HZO FeFET toward High-Performance Analog In-Memory Computing.
〇Kyungsoo Park1, Sangkuk Han1, Chulwon Chung1, MinHyuk Kim1, Changhwan Choi1,2 (1. Division of Materials Science and Engineering, Univ. of Hanyang (Korea), 2. Department of Semiconductor Engineering, Univ. of Hanyang (Korea))