[J-6] Emerging Memory Devices, and DRAM

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[J-6-05 (Late News)] Temperature Dependence of Non-polar Switching Characteristics of carbon-doped HfO_x thin films formed by mist CVD for CeRAM

〇Masamichi Azuma^1,2, Mamoru Ikeda¹, Tsubasa Miyamoto¹, Hiroyuki Nishinaka¹ (1. Kyoto Institute of Technology (Japan), 2. Symetrix Corp. (United States of America))