Presentation Information
[K-3-03]Nearly Ideal Subthreshold Swing in Monolayer WSe2 Top-Gate pFETs with Scaled EOT of 0.8 nm
〇Yu-wei Hsu1,2, Chen-Hsun Hsu2, Yu-Tung Lin1, Nien-En Chiang1, Ying-Zhan Chiu1, Shao-Heng Chen1, Sin-Yue Lee2, Ting-Hua Wei2, Zi-Quan Su2, Hung-Li Chiang2, I-Chih Ni1, Chih-I Wu1, Tsung-En Lee2 (1. National Taiwan Univ. (Taiwan), 2. National Yang Ming Chiao Tung Univ. (Taiwan))