Presentation Information

[K-4-03]Quantitative ToF-SIMS analysis of Transferred Nb Doped MoS2:
Direct Dopant Quantification and Micrometer Scale Impurity Distribution

〇Itsuki Tanaka1, Tomonori Nishimura1, Kaito Kanahashi1, Satoru Morito2, Keiji Ueno2, Kosuke Nagashio1 (1. The Univ. of Tokyo (Japan), 2. Saitama Univ. (Japan))