[M-4] GaN, Ga2O3 Processes

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[M-4-04] Comparative Study of Sn δ-Doped α-Ga₂O₃ Metal-Semiconductor Field-Effect Transistors on R-Plane and M-Plane Sapphire

〇Jia-Zhe Wu¹, Han-Wei Chen¹, Nei-En Chiu¹, Yu-Jie Ge¹, William Cheng-Yu Ma¹, Han-Yin Liu¹ (1. National Sun Yat-sen Univ. (Taiwan))