[M-4] GaN, Ga2O3 Processes

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[M-4-05 (Late News)] Photocapacitance Investigation of Deep-Level Trap States in Ga₂O₃ Thin Films Grown by Low-Pressure Hot-Wall Metalorganic Vapor Phase Epitaxy

〇Jun Jason Morihara¹, Tsukasa Kakio¹, Junya Yoshinaga^2,3, Takafumi Kamimura⁴, Yoshinao Kumagai², Masataka Higashiwaki^1,4 (1. Osaka Metropolitan Univ. (Japan), 2. Tokyo Univ. of Agric. and Tech. (Japan), 3. TAIYO NIPPON SANSO CORP. (Japan), 4. NICT (Japan))