[M-8] Si Materials and Devices

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[M-8-03] Influence of Pitch Shrinkage on Qrr in Trench Field Plate Power MOSFETs

〇Takuma Hara¹, Hiroaki Kato¹, Takuya Yasutake¹, Kazuyuki Sato¹, Hirofumi Kawai¹, Shigeru Nakajima¹, Tatsuya Ohguro¹, Yusuke Kawaguchi¹ (1. Toshiba Electronic Devices & Storage Corp (Japan))