[N-1] Oxide Semiconductor Devices 1

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[N-1-01 (Invited)] Nanosheet Oxide Semiconductor Transistors for 3D integrated devices

〇Masaharu Kobayashi¹ (1. The Univ. of Tokyo (Japan))

DOI:

https://doi.org/10.7567/SSDM.2025.N-1-01