2025 International Conference on Solid State Devices and Materials
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Mon. Sep 15, 2025
Tue. Sep 16, 2025
Wed. Sep 17, 2025
Thu. Sep 18, 2025
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4:30 PM - 4:45 PM JST
(7:30 AM - 7:45 AM UTC)
[N-2-05 (Late News)]
Effects of Ozone Concentration on ALD Copper Oxide TFTs Exhibiting High-Temperature Stability Compatible with NAND Process
〇Ji-Hwan Choi
1
, JaeKyeong Jeong
1
(1. Hanyang University (Korea))
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