[N-4] Oxide Semiconductor Devices 4

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[N-4-01] Balancing Work Function and Contact Resistance in IGZO TFTs via Pt-Al Alloying

〇Krittin Auewattanapun^1,3, Juan Paolo S. Bermundo¹, Senku Tanaka², Hidenori Kawanishi¹, Ratchatee Techapiesancharoenkij³, Yukiharu Uraoka¹ (1. Nara Inst. of Science and Technology (NAIST) (Japan), 2. Kindai Univ. (Japan), 3. Kasetsart Univ. (Thailand))