[N-5] Ferroelectric Memories and Gate Stack

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[N-5-02] Solid Phase Epitaxy-Driven Enhancement of Ferroelectric Phase Fraction in Hf_1-xZr_xO₂ Thin Films

〇Kuan-Ming Chen¹, Ming-Lun Tsai², Chia-Wei Hsu¹, Chia-Yin Hsiung³, Wei-Lin Yeh⁴, Yuan-Chieh Tseng¹ (1. Department of Materials Science and Engineering, National Yang Ming Chiao Tung University (Taiwan), 2. Institute of Pioneer Semiconductor Innovation, National Yang Ming Chiao Tung University (Taiwan), 3. Graduate Program of Nanotechnology, Department of Materials Science and Engineering, National Yang Ming Chiao Tung University (Taiwan), 4. Degree Program of Semiconductor Material and Process Equipment, National Yang Ming Chiao Tung University (Taiwan))