Presentation Information

[N-6-03]Origin for Anomalous Reverse Short-Channel Effect in Poly-Si TFTs

〇Geng-Yuan Xie1, Cheng-Kuei Lee1, Guo-Wei Huang2, Pei-Wen Li1, Ruey-Dar Chang3, Horng-Chih Lin1 (1. National Yang Ming Chiao Tung Univ. (Taiwan), 2. Taiwan Semiconductor Research Inst. (Taiwan), 3. Chang-Gung Univ. (Taiwan))