Session Details

[N-6]Group-IV, III-V based Thin-film Growth, and Device Application

Thu. Sep 18, 2025 10:15 AM - 12:15 PM JST
Thu. Sep 18, 2025 1:15 AM - 3:15 AM UTC
Room N (416+417, 4th Floor)
Session Chair: Kaoru Toko (Univ. of Tsukuba), Ryo Matsumura (NIMS)

[N-6-01 (Invited)]Carrier mobility enhancement of extremely-thin body Ge-On-Insulator (GOI) MOSFETs

〇Shinichi Takagi1,2, Xueyang Han1, Chia-Tsong Chen1, Kei Sumita1, Mitsuru Takenaka1, Kasidit Toprasertpong1 (1. The Univ. of Tokyo (Japan), 2. Teikyo Univ. (Japan))

[N-6-02]Low-Operation Voltage Nano-Filter Layer Ni-Induced Crystallization Poly-Si Complementary Thin-Film Transistors with Low-Thermal Budget

〇Po-Yi Kuo1 (1. National Chin Yi Univ. of Technology (Taiwan))

[N-6-03]Origin for Anomalous Reverse Short-Channel Effect in Poly-Si TFTs

〇Geng-Yuan Xie1, Cheng-Kuei Lee1, Guo-Wei Huang2, Pei-Wen Li1, Ruey-Dar Chang3, Horng-Chih Lin1 (1. National Yang Ming Chiao Tung Univ. (Taiwan), 2. Taiwan Semiconductor Research Inst. (Taiwan), 3. Chang-Gung Univ. (Taiwan))

[N-6-04]Optimized high-speed CW Laser Annealing for High and Dopant Activation and Mobility in Sb-Doped Ge Films on Quartz

〇Yuta Goto1,2, Ryo Matsumura2, Naoki Fukata1,2 (1. Univ. of Tsukuba (Japan), 2. NIMS (Japan))

[N-6-05]Effect of the Al-Catalyst-Layer on the Growth of Spherulite-Like GeS Thin Films and their Birefringent Properties

〇Qinqiang Zhang1, Ryo Matsumura1, Naoki Fukata1,2 (1. NIMS (Japan), 2. Univ. of Tsukuba (Japan))

[N-6-06]Impact of the precursor conditions on the solid-phase crystallizationof amorphous InGaAs thin films on glass substrates

〇Yutaka Kiyono1,2, Koki Nozawa1,2, Seo Jisol1, Takashi Suemasu1,2, Kaoru Toko1,2 (1. The Univ. of Tsukuba (Japan), 2. Inst. of Applied Physics (Japan))

[N-6-07]Demonstrating the Superiority of Atomic Layer Etching in 150-nm Gate AlGaN/GaN MOSHEMTs for Ka-Band RF Applications

〇Hsuan-Yao Huang1, Cheng-Xian Liu1, Yu Chen1, Kuan-Pang Chang1, Tsung-Ying Yang1, You-Chen Weng2, Jui-Sheng Wu2, Cheng-Jun Huang1, Fitriyadi Fitriyadi1, You-Ting Lin1, Chung-Han Chiu1, Edward Yi Chang1,2 (1. International College of Semiconductor Technology, National Yang Ming Chiao Tung University (Taiwan), 2. Industry Academia Innovation School, National Yang Ming Chiao Tung University (Taiwan))