Presentation Information
[SO-PS-01-05]A Machine Learning Approach to FEOL/MOL Parasitic Capacitance Extraction for the Complementary FET(CFET)
〇Jaehong Park1,2, Seung Kyu Kim1,2, Johyeon Kim1, Kee-Won Kwon1, Jongwook Jeon1 (1. The Univ. Sungkyunkwan (Korea), 2. Samsung Electronics (Korea))