[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

1:46 PM - 1:48 PM JST(4:46 AM - 4:48 AM UTC)

[SO-PS-01-09] Clarification of the Mechanism of Crystallization
by the Topmost ZrO₂ Layer in ZrO₂/Hf_0.5Zr_0.5O₂ Stack

〇Rina Takahisa¹, Takashi Onaya^1,2, Atsushi Tamura¹, Koji Kita¹ (1. Department of Advanced Materials Science, Graduate School of Frontier Sciences, The Univ. of Tokyo (Japan), 2. Res. Center for Materials Nanoarchitectonics (MANA), National Inst. for Materials Sci. (Japan))