[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

1:44 PM - 1:46 PM JST(4:44 AM - 4:46 AM UTC)

[SO-PS-02-08] Improvement on Ferroelectricity of HfO₂-ZrO₂ Superlattice on Si with an Ultra-thin Si₃N₄ Interfacial Layer

〇Jiayuan Zhang^1,2, Zhuoyi Ma¹, Nazmus Sakib², Anjana Rajan^1,2, Andreas Grenmyr^1,2, Detlev Grützmacher¹, Joachim Knoch², Qing-Tai Zhao¹ (1. Res. Center Jülich (Germany), 2. RWTH Aachen (Germany))