[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

1:50 PM - 1:52 PM JST(4:50 AM - 4:52 AM UTC)

[SO-PS-02-11] Switching Dynamics of TiN and Pd Gated MFIS Hf0.5Zr0.5O2 Capacitors: Impact of Gate Metal and Bias Polarity on Ferroelectric Operation

〇Wei Tung Chen¹, Jia-Tai Wu¹, Cheng-Hung Wu¹, Chun-Jung Su^2,3, Vita Pi-Ho Hu¹ (1. National Taiwan Univ. (Taiwan), 2. National Yang Ming Chiao Tung Univ. (Taiwan), 3. Taiwan Semiconductor Research Inst. (Taiwan))