Presentation Information

[SO-PS-02-15]Comparative Evaluation of Recovery Schemes for Hafnium-Based Ferroelectric Capacitors

〇Man Yutai1, Du Peiyuan1,2, Liu Huan1,2, Yu Fei1,2, Li Dongya1,2, Zhang Hongrui1, Chen Bing1,2, Cheng Ran3, Ke Mengnan4, Liu Yan2, Yu Xiao1,2, Han Genquan1,2 (1. Hangzhou Institute of Technology, Xidian University (China), 2. School of Microelectronics, Xidian University (China), 3. College of Integrated Circuits, Zhejiang University (China), 4. Institute for Multidisciplinary Sciences, Yokohama National University (Japan))