Presentation Information
[SO-PS-04-05]TCAD and Experimental Study of Geometric Components in Charge Pumping Current for Accurate Characterization of Interface Trap Density in SiC pMOSFETs
〇Kazuma Shimura1, Dai Okamoto1, Yuta Taguchi1, Kenta Kimata1, Mitsuru Sometani2, Hirohisa Hirai2, Mitsuo Okamoto2, Tetsuo Hatakeyama1 (1. Toyama Pref. Univ. (Japan), 2. AIST (Japan))