[SO-PS-04] 04: Power / High‐speed Devices and Materials

1:56 PM - 1:58 PM JST(4:56 AM - 4:58 AM UTC)

[SO-PS-04-14] Ultra Low On-Resistance of Novel Quaternary QST Substrate with HfAlO Dielectric Layer HEMT

〇Kuang Ting Hsieh², Yi Hsuan Chang¹, Yan Kuei Wu¹, Wei Chou Hsu^1,2 (1. Inst. of Microelectronics, Department of Electrical Eng., National Cheng Kung Univ. (Taiwan), 2. Academy of Innovative Semiconductor and Sustainable Manufac., National Cheng Kung Univ. (Taiwan))