[SO-PS-08] 08: Low Dimensional Devices and Materials

1:46 PM - 1:48 PM JST(4:46 AM - 4:48 AM UTC)

[SO-PS-08-09] Crystallinity Improvement for PVD-MoS₂ Films by Plasma Damage Reduction with Higher Deposition Pressure

〇Naoki Matsunaga¹, Jaehyo Jang¹, Soma Ito¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹ (1. Institute of Science Tokyo (Japan))