[SO-PS-08] 08: Low Dimensional Devices and Materials

2:10 PM - 2:12 PM JST(5:10 AM - 5:12 AM UTC)

[SO-PS-08-21] Seeding ALD of High-k Dielectrics on TMD n/p- Dual-Gate FETs with Symmetrical V_TH for CMOS Application

〇Zi-Jun Su¹, Jyun-Hong Chen², Min-Gji Liu¹, Yu-Lun Chueh¹, Chao-Hui Yeh¹, Chang-Hong Shen¹ (1. The Univ. of Tsinghua (Taiwan), 2. The Inst. of Taiwan Semiconductor Research (Taiwan))