[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

1:40 PM - 1:42 PM JST(4:40 AM - 4:42 AM UTC)

[SO-PS-10-06] Preparation of In₂O₃ based transparent conductive material for deep UV device

〇Masaki Yasuda¹, Takeya Daichi¹, Murata Kotaro¹, Jumpei Kamikawa¹, Nobuhisa Fujima¹, Hiroko Kominami¹, Kazuhiko Hara¹, Akihiro Yamaji², Shunsuke Kurosawa² (1. Shizuoka Univ. (Japan), 2. Tohoku Univ. (Japan))