[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

1:48 PM - 1:50 PM JST(4:48 AM - 4:50 AM UTC)

[SO-PS-10-10] High-Performance Stable In₂O₃ Field-Effect Transistors by Atomic Layer Deposition Process

〇Ruibin Duan¹, Ce Ning¹, Jiakang Zhang², Dunshan Yu¹, Junchen Dong², Dedong Han¹, Xing Zhang^1,3 (1. School of Integrated Circuits, School of Software and Microelectronics, Beijing Advanced Innovation Center for Integrated Circuits, Peking Univ. (China), 2. School of Info. & Communication Eng., Beijing Info. Sci. and Tech. Univ. (China), 3. Peking Univ. Shenzhen Graduate School (China))