[SO-PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

2:20 PM - 2:22 PM JST(5:20 AM - 5:22 AM UTC)

[SO-PS-11-11] Segmentation of Structured Defect Patterns in Wafer Maps Using U-Net Trained on Programmatically Generated Rule-Based Synthetic Data

〇Hironori Banba^1,2, Ichiro Omura² (1. GlobalWafers Japan Co., Ltd. (Japan), 2. Kyushu Institute of Technology (Japan))