講演情報
[19p-B205-10][JSAP-Optica Joint Symposia 2023 Invited Talk] Femtosecond laser ablation of dielectrics: experimental strategies for probing dynamics and controlling performance
〇Mario Garcia-Lechuga1, Jan Siegel1, Javier Solis1, Nicolas Sanner2, Olivier Uteza2, David Grojo2 (1.Institute of Optics, CSIC, 2.Aix Marseille Univ, CNRS, LP3)
キーワード:
femtosecond laser processing、dielectrics、time-resolved measurement
This study experimentally explores the fundamental aspects and complexities of femtosecond laser processing of dielectrics. Firstly, time-resolved microscopy investigates electron excitation, ablation, and heat-affected zone dynamics in dielectrics of photonic interest. Secondly, the role of laser wavelength (UV to MIR) is examined, determining aspects such as spatial resolution, ablation threshold, and maximum crater depth. Physical explanations, including simulations, are provided to elucidate their origins.