講演情報
[21a-C402-7]Effect of magnetostrictive film thickness on enhancing magnetic sensing performance of diamond MEMS resonator
〇(PC)Zilong Zhang1, Guo Chen1, Keyun Gu1, Yasuo Koide1, Satoshi Koizumi1, Meiyong Liao1 (1.NIMS)
キーワード：
Daimond、MEMS resonator、Magnetic sensor
Single-crystal diamond (SCD) is a promising material for high-performance and high-reliability MEMS devices. Based on the magnetostrictive effect, the SCD resonator with a magneto-strictive FeGa film offers a promising strategy for fabricating high-performance magnetic sensors.
In our previous works, the magnetic sensors of SCD resonators with FeGa/Ti thin films realized the sensing up to 773K, which was superior to the as-reported high-temperature magnetic sensors.The impact of various interlayers on sensing performances was disclosed and discussed. In addition, an integrated on-chip SCD-based resonator through using a self-sensing and actuation scheme was proposed for high-temperature magnetic sensing. The on-chip sensor was electrically actuated and the resonance vibration was simultaneously electrically readout.
In the present work, the magnetic sensors of SCD resonators with FeGa films of various thickness were developed to improve the sensing performance. The FeGa films on SCDs exhibited low coercivity (<30 Oe) and high saturation magnetization. The frequency shifts of the SCD resonators are greatly enhanced by the increasing FeGa thickness, indicating an exponential increasing relationship. This work offers a useful guidance to fabricate high performance SCD-based sensors.
In our previous works, the magnetic sensors of SCD resonators with FeGa/Ti thin films realized the sensing up to 773K, which was superior to the as-reported high-temperature magnetic sensors.The impact of various interlayers on sensing performances was disclosed and discussed. In addition, an integrated on-chip SCD-based resonator through using a self-sensing and actuation scheme was proposed for high-temperature magnetic sensing. The on-chip sensor was electrically actuated and the resonance vibration was simultaneously electrically readout.
In the present work, the magnetic sensors of SCD resonators with FeGa films of various thickness were developed to improve the sensing performance. The FeGa films on SCDs exhibited low coercivity (<30 Oe) and high saturation magnetization. The frequency shifts of the SCD resonators are greatly enhanced by the increasing FeGa thickness, indicating an exponential increasing relationship. This work offers a useful guidance to fabricate high performance SCD-based sensors.